Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining
書誌事項
- タイトル
- Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining
- 著者
- Kazuya Yamamura, et al.
収録刊行物
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- Annals of the CIRP 56
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Annals of the CIRP 56 541-544, 2008