[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining

Bibliographic Information

Title
Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining
Author
Kazuya Yamamura, et al.

Journal

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Details

  • CRID
    1010282257011688968
  • Article Type
    journal article
  • Data Source
    • KAKEN

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