著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining,Annals of the CIRP 56,,,2008,,,541-544,https://cir.nii.ac.jp/crid/1010282257011688968,