Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining
Bibliographic Information
- Title
- Damage-free improvement of thickness uniformity of quartz crystal wafer by plasma chemical vaporization machining
- Author
- Kazuya Yamamura, et al.
Journal
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- Annals of the CIRP 56
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Annals of the CIRP 56 541-544, 2008
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Details 詳細情報について
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- CRID
- 1010282257011688968
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- Article Type
- journal article
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- Data Source
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- KAKEN