[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas

Bibliographic Information

Title
Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas
Author
Hidemitsu Aoki, Takuro Masuzumi, Makoto Hara, Daisuke Watanabe, Chiharu Kimura, Takashi Sugino

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Details

  • CRID
    1010282257011907845
  • Article Type
    journal article
  • Data Source
    • KAKEN

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