著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas,Thin Solid Films Vol.518 lssue8,,,2010,,,2102-2104,https://cir.nii.ac.jp/crid/1010282257011907845,