Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100)
書誌事項
- タイトル
- Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100)
- 著者
- Yoshifumi Ikoma, Hafizal Yahaya, Hirofumi Sakita, Yuta Nishino, Teruaki Motooka
収録刊行物
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- Proc.SPIE 7995 79951Y
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Proc.SPIE 7995 79951Y 2010