[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100)

Bibliographic Information

Title
Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100)
Author
Yoshifumi Ikoma, Hafizal Yahaya, Hirofumi Sakita, Yuta Nishino, Teruaki Motooka

Journal

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Details

  • CRID
    1010282257034325504
  • Article Type
    journal article
  • Data Source
    • KAKEN

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