著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100),Proc.SPIE 7995 79951Y,,,2010,,,,https://cir.nii.ac.jp/crid/1010282257034325504,