[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method

Bibliographic Information

Title
Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
Author
K.Kobari, Y.Yamamoto, M, Sakuma, S.Akao, T.Tsuji, K.Yamanaka

Journal

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Details

  • CRID
    1010282257072629519
  • Article Type
    journal article
  • Data Source
    • KAKEN

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