Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
書誌事項
- タイトル
- Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
- 著者
- K.Kobari, Y.Yamamoto, M, Sakuma, S.Akao, T.Tsuji, K.Yamanaka
収録刊行物
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- Japanese Journal of Applied Physics 48(7)
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Japanese Journal of Applied Physics 48(7) 2009
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詳細情報
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- CRID
- 1010282257072629519
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- 資料種別
- journal article
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- データソース種別
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- KAKEN