著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Effect of wafer pre-cleaning and plasma irradiation to wafer surfaces for plasma-assisted surface activated bonding,Japanese Journal of Applied Physics,,,2010,49,,86204,https://cir.nii.ac.jp/crid/1010282257082189829,