Helicon-wave-excited- plasma sputtering epitaxy of Nb-doped Ti0-2 films on GaN
Bibliographic Information
- Title
- Helicon-wave-excited- plasma sputtering epitaxy of Nb-doped Ti0-2 films on GaN
- Author
- A.N.Fouda, K.Hazu, T.Nakayama, A.Tanaka, S.F.Chichibu
Journal
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- Physica Status Solidi (c)
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Physica Status Solidi (c) 8 534-536, 2011
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Details 詳細情報について
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- CRID
- 1010282257082276653
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- Article Type
- journal article
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- Data Source
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- KAKEN