著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Fabrication of Amorphous Silicon Carbide Films from Decomposition of Tetramethylsilane using ECR plasma of Ar,J. Phys. Conf. Ser.,,,,(印刷中),,,https://cir.nii.ac.jp/crid/1010282257097332992,