Preparation of Cr(N,0) thin films by RF reactive unbalanced magnetron sputtering
書誌事項
- タイトル
- Preparation of Cr(N,0) thin films by RF reactive unbalanced magnetron sputtering
- 著者
- Jun Shirahata, Tetsutaro Ohori, Hiroki Asami, Tsuneo Suzuki, Tadachika Nakayama, Hisayuki Suematsu, Yoshiharu Nakajima, Koichi Niihara
収録刊行物
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- Thin Solid Films
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Thin Solid Films 519[11] 3497-3500, 2011