Periodic Nanopattern Formation on Si with Femtosecond-Laser-Induced Surface Plamon Polaritons
書誌事項
- タイトル
- Periodic Nanopattern Formation on Si with Femtosecond-Laser-Induced Surface Plamon Polaritons
- 著者
- K. Miyazaki and G. Miyaji
収録刊行物
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- Proceedings of the 13th International Symposium on Laser Precision Microfabrication
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Proceedings of the 13th International Symposium on Laser Precision Microfabrication #12 2012