著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics,J. Manufacturing Science and Engineering,,,2012,134,,51001,https://cir.nii.ac.jp/crid/1010282257154961282,