著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems,Jpn. J. Appl. Phys vol. 44,,,2005,,,2016-2020,https://cir.nii.ac.jp/crid/1010282257407551242,