著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Finishing of EUV photomask substrates by CNC precessed bonnet polisher,Proc. SPIE,,,2013,8880,,,https://cir.nii.ac.jp/crid/1010282257412534805,