Ge/GeO2 Interface Control with High Pressure Oxidation for Improving Electrical Characteristics
書誌事項
- タイトル
- Ge/GeO2 Interface Control with High Pressure Oxidation for Improving Electrical Characteristics
- 著者
- C.H. Lee, T. Tabata, T. Nishimura, K. Nagashio, K. Kita, A. Toriumi
収録刊行物
-
- ECS Trans. 19(1)
-
ECS Trans. 19(1) 165-173, 2009