[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation

Bibliographic Information

Title
Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation
Author
Shinya Iwashita, Hiroshi Miyata, Kazunori Koga, Hidefumi Matsuzaki, Masaharu Shiratani, Morita Akiyama

Journal

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Details

  • CRID
    1010282257430724608
  • Article Type
    journal article
  • Data Source
    • KAKEN

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