著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation,Proceedings of Dry Process International Symposium,,,2009,,,99-100,https://cir.nii.ac.jp/crid/1010282257430724608,