Application of SPELEEM to high-k gate dielectrics:relationshipbetween surface morphology and photoelectron spectra duringHf-silicide formation
書誌事項
- タイトル
- Application of SPELEEM to high-k gate dielectrics:relationshipbetween surface morphology and photoelectron spectra duringHf-silicide formation
- 著者
- R.Yasuhara
収録刊行物
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- Appl.Surf.Sci (In press)
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Appl.Surf.Sci (In press) 2007