著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Analysis of Internal Crack Propagation in Silicon Due to Permeable Laser Irradiation-Study on Processing Mechanism of Stealth Dicing,Journal of Material Science and Engineering,,,2011,5(掲載予定),,,https://cir.nii.ac.jp/crid/1010282257442452128,