著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
星井 拓也,Impact of InGaAs surface nitridation on interface properties of InGaAs metal-oxide-semiconductor capacitors using electron cyclotron resonance plasma sputtering SiO2,Applied Physics Letters,,,2010,97,,132102,https://cir.nii.ac.jp/crid/1010282257459106944,