[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

A micro thermal switch with a stiffness-enhanced thermal isolation structure

Bibliographic Information

Title
A micro thermal switch with a stiffness-enhanced thermal isolation structure
Author
T.Tsukamoto, M.Esashi, S.Tanaka

Journal

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Details

  • CRID
    1010282257459219072
  • Article Type
    journal article
  • Data Source
    • KAKEN

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