著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,A micro thermal switch with a stiffness-enhanced thermal isolation structure,J.Micromech.Microeng.,,,2011,21,,104008,https://cir.nii.ac.jp/crid/1010282257459219072,