著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
堀内 敏行 and 小林 宏史,Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination,IOSR Journal of Applied PHysics,,,2022,14(5)Series-2,,12-20,https://cir.nii.ac.jp/crid/1010298668284171266,