Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures

Bibliographic Information

Title
Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
Author
Kenjiro Uesugi, Yusuke Hayashi, Kanako Shojiki, Hideto Miyake

Journal

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Details

  • CRID
    1011975830715923072
  • Article Type
    journal article
  • Data Source
    • KAKEN

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