著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
,Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures,Appl. Phys. Express,,,2019,12,,,https://cir.nii.ac.jp/crid/1011975830715923072,