著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
"Zhang, De-Yuan and Ono, Takahito and Esashi, Masayoshi",Piezoactuator-integrated monolithic microstage with six degrees of freedom,"TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems",,Institute of Electrical and Electronics Engineers,2003,2,,1518-1521,https://cir.nii.ac.jp/crid/1050001202759265920,