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YAGレーザーによる微細加工の研究

IR

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Other Title
  • YAG レーザー ニ ヨル ビサイ カコウ ノ ケンキュウ
  • A Study on Micro Material Processing by YAG Laser

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Abstract

The laser wavelength dependence on the micro laser material processing mechanism is investigated. Several material targets were irradiated by the focused Q-switched YAG laser and its second and forth harmonic light pulses. After the laser pulses irradiated,a small hole of the focused laser light beam diameter was observed on the target surface. The depth of holes increase in the shorter wavelength laser pulses irradiation

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