著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
"Minh, Phan Ngoc and Ono, Takahito and Sato, Nobuyuki and Mimura, Hidenori and Esashi, Masayoshi",Micro electron field emitter array with focus lenses for multi-electron beam lithography,"TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems",,Institute of Electrical and Electronics Engineers,2003,2,,1295-1298,https://cir.nii.ac.jp/crid/1050282677720496896,