著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
"Hayashi, Daisuke and Nakai, Junya and Minami, Masakazu and Kamimoto, Takahiro and Deguchi, Yoshihiro",Feasibility of Controlling Gas Concentration and Temperature Distributions in a Semiconductor Chamber with CT-TDLAS,Journal of Vibration Testing and System Dynamics,2475-4811,L & H Scientific Publishing,2020-12,4,4,297-309,https://cir.nii.ac.jp/crid/1050288525443135104,