著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
"ハヤシ, ダイスケ and ナカイ, ジュンヤ and ミナミ, マサカズ and カミモト, タカヒロ and 出口, 祥啓",Feasibility of Controlling Gas Concentration and Temperature Distributions in a Semiconductor Chamber with CT-TDLAS,Journal of Vibration Testing and System Dynamics,24754811,L & H Scientific Publishing,2020-12,4,4,297-309,https://cir.nii.ac.jp/crid/1050302172852690176,