Determination of the point resolution of high-resolution transmission electron microscope using the through-focus technique

機関リポジトリ (HANDLE) オープンアクセス

書誌事項

タイトル別名
  • Point resolution of high resolution transmission electron microscope (HREM) and its measurement methods.

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説明

From the viewpoint of evaluating the instrumental performance of high-resolution electron microscopy (HREM), the Scherzer condition was investigated using information theory. As a result, the optimum defocus amount Δf can be expressed based on (C_sλ)^<1/2>, and the formula Δf = 1.12(C_sλ)^<1/2> is obtained. Furthermore, a procedure for measuring point resolution using the through-focus technique is developed, and a new method for determining the spherical aberration coefficient using the variance of Δf is introduced in the procedure.

収録刊行物

  • Micron

    Micron 182 103639-, 2024-07

    Elsevier

キーワード

詳細情報 詳細情報について

  • CRID
    1050303932808675072
  • NII書誌ID
    AA10892936
  • ISSN
    18784291
    09684328
  • HANDLE
    2324/7238745
  • 本文言語コード
    en
  • 資料種別
    journal article
  • データソース種別
    • IRDB

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