Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control
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Abstract
A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s.
Journal
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- Optical Engineering
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Optical Engineering 43 (6), 1329-1333, 2004-06
International Society for Optical Engineering, SPIE
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Details 詳細情報について
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- CRID
- 1050564289194461696
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- NII Article ID
- 120006747007
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- NII Book ID
- AA00333891
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- ISSN
- 00913286
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- HANDLE
- 10191/27597
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- Text Lang
- en
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- Article Type
- journal article
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- Data Source
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- IRDB
- CiNii Articles