Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
"小平, 行秀 and Kohira, Yukihide and 高橋, 篤司 and TAKAHASHI, Atsushi",Localization concept of re-decomposition area to fix hotspots for LELE process,"Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530V",0277-786X,SPIE,2014-03,9053,,1-8,https://cir.nii.ac.jp/crid/1050574047120447616,https://doi.org/10.1117/12.2046263