著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
"Kamataki, Kunihiro and Nagamatsu, Daiki and Yang, Tao and Abe, Kohei and Yamamoto, Akihiro and Nagao, Iori and Arima, Toshiaki and Otaka, Michihiro and Yamamoto, Yuma and Yamashita, Daisuke and Okumura, Takamasa and Yamashita, Naoto and Itagaki, Naho and Koga, Kazunori and Shiratani, Masaharu",Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma,AIP Advances,2158-3226,AIP Publishing,2022-08-01,12,8,,https://cir.nii.ac.jp/crid/1050863860427764224,