著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Vladimirsky, Yuli and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International","Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California",,SPIE,1999,Proceedings,,"0819431508,0819431508",,https://cir.nii.ac.jp/crid/1130000793671134592