著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Singh, Rajendra and Society of Photo-optical Instrumentation Engineers and North Carolina State University. Center for Advanced Electronic Materials Processing and University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing and SEMATECH (Organization)","Rapid isothermal processing : 12-13 October 1989, Santa Clara, California",,SPIE,1990,Proceedings,,0819402257,,https://cir.nii.ac.jp/crid/1130000793686286080