著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Nihtianov, Stoyan and Luque, A. (Antonio)",Smart sensors and MEMS : intelligent sensing devices and microsystems for industrial applications,2nd ed,Woodhead Pub.,2018,Woodhead Publishing series in electronic and optical materials,,9780081020555,,https://cir.nii.ac.jp/crid/1130000793739641856