著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Shenai, Krishna",VLSI metallization : physics and technologies,,Artech House,1991,The Artech House materials science library,,0890065012,,https://cir.nii.ac.jp/crid/1130000793755439744