著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Vladimirsky, Yuli and Society of Photo-optical Instrumentation Engineers","Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California",,SPIE,1998,Proceedings,,0819427764,,https://cir.nii.ac.jp/crid/1130000793774562816