著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Glembocki, Orest J. and Pollak, Fred H. and Song, J. J. and Society of Photo-optical Instrumentation Engineers and Metallurgical Society (U.S.)","Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida",,SPIE,1987,Proceedings,,089252829X,,https://cir.nii.ac.jp/crid/1130000793824127104