著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Progler, Christopher J. and Society of Photo-optical Instrumentation Engineers","Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA",,SPIE,2000,Proceedings,,"0819436186,0819436186",,https://cir.nii.ac.jp/crid/1130000793846320512