著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Habraken, F. H. P. M.",LPCVD silicon nitride and oxynitride films : material and applications in integrated circuit technology,,Springer-Verlag,1991,Research reports ESPRIT,,"0387539549,3540539549",,https://cir.nii.ac.jp/crid/1130000793874277504