著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics. International Symposium and Mathad, G. S. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division and Electrochemical Society. Electrodeposition Division and Electrochemical Society. Meeting","Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium",,Electrochemical Society,2001,Proceedings,,"156677294X,1566773903",,https://cir.nii.ac.jp/crid/1130000793878185472