著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Conference on MEMS and Nanotechnology and Liu, Changhui","Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China",,Trans Tech Publications,2014,Advanced materials research,,9783038350477,,https://cir.nii.ac.jp/crid/1130000793922097664