著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Veteran, Janice L. and Materials Research Society","Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.",,Materials Research Society,2002,Materials Research Society symposium proceedings,,1558996524,,https://cir.nii.ac.jp/crid/1130000793946018688