著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Claeys, Cor L. and Electrochemical Society. Meeting",ULSI process integration 5,,Electrochemical Society,2007,ECS transactions,,9781566775724,,https://cir.nii.ac.jp/crid/1130000794025535616