著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Christou, A.",Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics,,U.S. G.P.O.,1978,NBS special publication,,,,https://cir.nii.ac.jp/crid/1130000794029452672