著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Mathad, G. S. and Hess, Dennis W. and Electrochemical Society. Industrial Electrolysis and Electrochemical Engineering Division",Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium,,Electrochemical Society,2000,Proceedings,,1566772532,,https://cir.nii.ac.jp/crid/1130000794071318784